設備產品
Photolithography
Products for safe storage and handling of reticles,as well as mask aligners and uv meters.
批量式電漿輔助氣相沉積設備
批量式电浆辅助气相沉积系统为一种使用化学气相沉积技术,可为沉积反应提供能量
類鑽碳膜製程設備
類鑽膜(Diamond-like Carbon,DLC)由高濃度之sp3鍵結(鑽石,Diamond)與低濃度的sp2鍵結(石墨,Graphite)所結合而成。