Product ID:A100003

UHV deposition system

  • Substrate Size: up to 8 inch
  • <10-10 Torr Ultimate vacuum 
  • Substrate heating up to 1000˚C
  • Load-Lock System
  • Full auto control with touch screen display
  • Custom Design available
  • Fully Safety Interlocked
  • Full automatic control system with touch screen display
  • Real time record system data (pressure, substrate temperature, deposition rate)
  • Real time process control to provide precise film quality and film reliability
  • Multiple levels of access with password protection
  • Pumping system with TSP / Ion pump


UHV Sputter/Thermal/E-Beam

Semiconductor films

Ultra-thin films

Nanostructured films